0
Technical Briefs

Design and TEM Simulation of a MEMS Based Microcantilever Cardiac Marker Sensor

[+] Author and Article Information
Sree Vidhya

Healthcare Practice, Frost and Sullivan [P] Ltd., Chennai 600035, India

Gideon Praveen Kumar, Lazar Mathew

School of Biosciences and Technology, VIT University, Vellore, Tamil Nadu 632014, India

J. Nanotechnol. Eng. Med 1(1), 014501 (Sep 16, 2009) (4 pages) doi:10.1115/1.3212821 History: Received March 13, 2009; Revised May 02, 2009; Published September 16, 2009

Piezoresistive actuation of a microcantilever induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces exerted is small, increasing the sensitivity of the microcantilever becomes critical. In this paper, we are considering to achieve this by geometric variation in the cantilever. The sensitivity of the cantilever was improved so that the device can sense the presence of antigen even if the magnitude of surface-stresses over the microcantilever was very small. We consider a “T-shaped” cantilever that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using INTELLISUITE software (a micro-electromechanical system design and simulation package). The simulations reveal that the T-shaped microcantilever is almost as sensitive as a thin cantilever and has relatively very low buckling effect. Simulations also reveal that with an increase in thickness of the cantilever, there is a proportional decrease in the sensitivity.

FIGURES IN THIS ARTICLE
<>
Copyright © 2010 by American Society of Mechanical Engineers
Your Session has timed out. Please sign back in to continue.

References

Figures

Grahic Jump Location
Figure 1

Cross section of the T-shape microcantilever design

Grahic Jump Location
Figure 2

INTELLISUITE auto mesh with 50×50 μm2

Grahic Jump Location
Figure 3

Displacement along Z-axis

Grahic Jump Location
Figure 7

Sensitivity versus cantilever thickness

Grahic Jump Location
Figure 6

Stress versus time

Grahic Jump Location
Figure 5

Load versus displacement

Grahic Jump Location
Figure 4

Stress at the anchoring region along Z-axis

Tables

Errata

Discussions

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In