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Technical Briefs

Simulation of Low Pressure MEMS Sensor for Biomedical Application

[+] Author and Article Information
S. Sathyanarayanan

Department of ICE,  SRM University, Tamilnadu 603203, India

A. Vimala Juliet1

Department of ICE,  SRM University, Tamilnadu 603203, Indiaprofvimalasrm@gmail.com

1

Corresponding author.

J. Nanotechnol. Eng. Med 2(3), 034502 (Jan 10, 2012) (3 pages) doi:10.1115/1.4004025 History: Received February 06, 2011; Revised March 29, 2011; Published January 10, 2012; Online January 10, 2012

Micromachining technology has greatly benefited from the success of developments in implantable biomedical microdevices. In this paper, microelectromechanical systems (MEMS) capacitive pressure sensor operating for biomedical applications in the range of 20–400 mm Hg was designed. Employing the microelectromechanical systems technology, high sensor sensitivities and resolutions have been achieved. Capacitive sensing uses the diaphragm deformation-induced capacitance change. The sensor composed of a rectangular polysilicon diaphragm that deflects due to pressure applied over it. Applied pressure deflects the 2 µm diaphragm changing the capacitance between the polysilicon diaphragm and gold flat electrode deposited on a glass Pyrex substrate. The MEMS capacitive pressure sensor achieves good linearity and large operating pressure range. The static and thermo electromechanical analysis were performed. The finite element analysis data results were generated. The capacitive response of the sensor performed as expected according to the relationship of the spacing of the plates.

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Copyright © 2011 by American Society of Mechanical Engineers
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Figures

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Figure 1

Structure of the capacitive pressure sensor on a glass substrate

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Figure 2

Deformation of the sensor diaphragm with applied pressure

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Figure 3

2D plot between pressure and Z-displacement of the sensor

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Figure 4

2D plot between pressure and capacitance of the sensor

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Figure 5

2D plot between Z-displacement and capacitance of the sensor to determine the pull-in point

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Figure 6

2D plot between frequency and Z-displacement of the sensor

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Figure 7

2D plot between Time and Z displacement of the sensor

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