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Proceedings Papers
Hermeticity Assessment of MEMS Micro Packages: Leak Rate Measurements Based on Infrared Spectroscopy
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 281-286, August 27–September 1, 2006
Publisher: American Society of Mechanical Engineers
Paper No: CANEUS2006-11039
Proceedings Papers
Marco Chiarini, Paolo Cerabolini, Giuseppe Pennestri`, Gian G. Bentini, Roberto Cocomazzi, Annalisa Cerutti, Alessio Nubile
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 111-116, August 27–September 1, 2006
Publisher: American Society of Mechanical Engineers
Paper No: CANEUS2006-11020
Proceedings Papers
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 195-198, August 27–September 1, 2006
Publisher: American Society of Mechanical Engineers
Paper No: CANEUS2006-11044
Proceedings Papers
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 27-30, August 27–September 1, 2006
Publisher: American Society of Mechanical Engineers
Paper No: CANEUS2006-11023
Proceedings Papers
Proc. ASME. CANEUS2006, CANEUS2006: MNT for Aerospace Applications, 89-94, August 27–September 1, 2006
Publisher: American Society of Mechanical Engineers
Paper No: CANEUS2006-11013