This paper presents the design, model identification, and control of a parallel-kinematic nanopositioning stage for general nanomanipulation and nanomanufacturing applications. The stage has a low degree-of-freedom monolithic parallel-kinematic mechanism featuring single-axis flexure hinges. The stage is driven by piezoelectric actuators, and its displacement is detected by capacitance gauges. The control loop is closed at the end effector instead of at each joint, so as to avoid calibration difficulties and guarantee high positioning accuracy. This design has strongly coupled dynamics with each actuator input producing in multiaxis motions. The nanopositioner is modeled as a multiple input and multiple output (MIMO) system, where the control design forms an important constituent in view of the strongly coupled dynamics. The dynamics that model the MIMO plant is identified by frequency domain and time-domain identification methods. The control design based on modern robust control theory that gives a high bandwidth closed loop nanopositioning system, which is robust to physical model uncertainties arising from flexure-based mechanisms, is presented. The bandwidth, resolution, and repeatability are characterized experimentally, which demonstrate the effectiveness of the robust control approach.
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July 2008
Research Papers
Robust Control of a Parallel- Kinematic Nanopositioner
Jingyan Dong,
Jingyan Dong
Department of Mechanical Science and Engineering,
University of Illinois at Urbana-Champaign
, Urbana, IL 61801
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Srinivasa M. Salapaka,
Srinivasa M. Salapaka
Department of Mechanical Science and Engineering,
University of Illinois at Urbana-Champaign
, Urbana, IL 61801
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Placid M. Ferreira
Placid M. Ferreira
Department of Mechanical Science and Engineering,
University of Illinois at Urbana-Champaign
, Urbana, IL 61801
Search for other works by this author on:
Jingyan Dong
Department of Mechanical Science and Engineering,
University of Illinois at Urbana-Champaign
, Urbana, IL 61801
Srinivasa M. Salapaka
Department of Mechanical Science and Engineering,
University of Illinois at Urbana-Champaign
, Urbana, IL 61801
Placid M. Ferreira
Department of Mechanical Science and Engineering,
University of Illinois at Urbana-Champaign
, Urbana, IL 61801J. Dyn. Sys., Meas., Control. Jul 2008, 130(4): 041007 (15 pages)
Published Online: June 9, 2008
Article history
Received:
January 30, 2007
Revised:
November 28, 2007
Published:
June 9, 2008
Citation
Dong, J., Salapaka, S. M., and Ferreira, P. M. (June 9, 2008). "Robust Control of a Parallel- Kinematic Nanopositioner." ASME. J. Dyn. Sys., Meas., Control. July 2008; 130(4): 041007. https://doi.org/10.1115/1.2936861
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