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Journal Articles

An Adaptive Spatial-Terminal Iterative Learning Strategy in Roll-to-Roll Control Problems

Zifeng Wang, Xiaoning Jin
Journal: Journal of Micro and Nano Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano Sci. Eng. September 2025, 13(3): 034502.
Paper No: JMNM-24-1042
https://doi.org/10.1115/1.4067640
Published Online: February 4, 2025
View Article titled, An Adaptive Spatial-Terminal Iterative Learning Strategy in Roll-to-Roll Control Problems
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Topics: Control equipment, Errors, Printing, Rollers, Tension, Motors, Iterative learning control, Design
Journal Articles

Error Budget of Wafer Bonding Alignment System Based on Vision

Rui Wang, Sen Lu, Kaiming Yang, Yu Zhu
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. June 2023, 11(2): 024503.
Paper No: JMNM-23-1057
https://doi.org/10.1115/1.4065333
Published Online: May 8, 2024
View Article titled, Error Budget of Wafer Bonding Alignment System Based on Vision
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Topics: Errors, Semiconductor wafers, Bonding
Journal Articles

A Systems Approach to Estimating the Uncertainty Limits of X-Ray Radiographic Metrology

Robert M. Panas, Jefferson A. Cuadra, K. Aditya Mohan, Rosa E. Morales
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2021, 9(1): 010901.
Paper No: JMNM-20-1012
https://doi.org/10.1115/1.4049421
Published Online: February 9, 2021
View Article titled, A Systems Approach to Estimating the Uncertainty Limits of X-Ray Radiographic Metrology
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Topics: Metrology, Sensors, Signals, Uncertainty, X-rays, Computerized tomography, Flow (Dynamics), Temperature, Errors, Electromagnetic scattering
Journal Articles

A Benchmark Artifact to Evaluate the Manufacturing of Microfeatures by Digital Light Processing Stereolithography

Lara Rebaioli, Irene Fassi
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. March 2020, 8(1): 010909.
Paper No: JMNM-19-1065
https://doi.org/10.1115/1.4046042
Published Online: February 13, 2020
View Article titled, A Benchmark Artifact to Evaluate the Manufacturing of Microfeatures by Digital Light Processing Stereolithography
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Topics: Manufacturing, Stereolithography, Dimensions, Errors, Resins
Journal Articles

A New Strategy for Laser Trepanning of Tapered Microholes

Jiacheng Song, Hong Shen, Zhenqiang Yao
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2019, 7(3): 031005.
Paper No: JMNM-19-1003
https://doi.org/10.1115/1.4044670
Published Online: October 1, 2019
View Article titled, A New Strategy for Laser Trepanning of Tapered Microholes
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Topics: Drilling, Errors, Laser beams, Lasers, Rotation, Cutting
Journal Articles

Quantitative Measurement of Functional Groups on Nanocarbon Allotropes Surface by Boehm Titration

M. Hernández-Ortiz, J. D. Lozano-López, S. M. Durón, M. Galván-Valencia, Y. Estevez-Martínez, H. A. Durán-Muñoz, J. Carrera-Escobedo, O. Guirette-Barbosa, I. Ortiz-Medina, L. A. Ramírez-Hernández, V. M. Castaño-Meneses
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 011002.
Paper No: JMNM-18-1023
https://doi.org/10.1115/1.4043419
Published Online: May 15, 2019
View Article titled, Quantitative Measurement of Functional Groups on Nanocarbon Allotropes Surface by Boehm Titration
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Topics: Carbon, Carbon dioxide, Carbon nanotubes, Errors, Oxidation, Uncertainty, Blanks
Journal Articles

Radial Throw in Micromilling: A Simulation-Based Study to Analyze the Effects on Surface Quality and Uncut Chip Thickness

Sudhanshu Nahata, Recep Onler, O. Burak Ozdoganlar
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 010907.
Paper No: JMNM-18-1053
https://doi.org/10.1115/1.4043176
Published Online: April 11, 2019
View Article titled, Radial Throw in Micromilling: A Simulation-Based Study to Analyze the Effects on Surface Quality and Uncut Chip Thickness
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Topics: Cutting, Errors, Micromilling, Simulation, Solid-liquid equilibrium, Surface roughness, Trajectories (Physics), Rotation, Micromachining, Kinematics
Journal Articles

Model-Based Coarse-Fine Virtual Calibration and Visual Servo for Augmented Reality-Assisted Peg-in-Hole Microassembly

Ren-Jung Chang, Jun-Fu Liu
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2018, 6(4): 041002.
Paper No: JMNM-18-1016
https://doi.org/10.1115/1.4041531
Published Online: October 16, 2018
View Article titled, Model-Based Coarse-Fine Virtual Calibration and Visual Servo for Augmented Reality-Assisted Peg-in-Hole Microassembly
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Topics: Calibration, Microassembling, Servomechanisms, Errors, Manufacturing, Virtual reality
Journal Articles

A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning

E. B. Brousseau, S. Thiery, B. Arnal, E. Nyiri, O. Gibaru, J. R. Mayor
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2017, 5(4): 041003.
Paper No: JMNM-17-1006
https://doi.org/10.1115/1.4037694
Published Online: September 28, 2017
View Article titled, A Computer-Aided Design and Manufacturing Implementation of the Atomic Force Microscope Tip-Based Nanomachining Process for Two-Dimensional Patterning
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Topics: Atomic force microscopy, Computer-aided design, Errors, Machining, Manufacturing, Computer software, Instrumentation
Journal Articles

Two-Side Laser Processing Method for Producing High Aspect Ratio Microholes

Vahid Nasrollahi, Pavel Penchev, Stefan Dimov, Lars Korner, Richard Leach, Kyunghan Kim
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2017, 5(4): 041006.
Paper No: JMNM-17-1013
https://doi.org/10.1115/1.4037645
Published Online: September 28, 2017
View Article titled, Two-Side Laser Processing Method for Producing High Aspect Ratio Microholes
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Topics: Drilling, Lasers, Machinery, Errors, Inspection
Journal Articles

A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications

Andrew Duenner, Tsung-Fu Yao, Bruno De Hoyos, Marianna Gonzales, Nathan Riojas, Michael Cullinan
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. December 2016, 4(4): 041006.
Paper No: JMNM-16-1027
https://doi.org/10.1115/1.4034610
Published Online: October 10, 2016
View Article titled, A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications
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Topics: Errors, Semiconductor wafers, Nanomanufacturing, Robots
Journal Articles

Smooth Surface Fabrication Based on Controlled Meniscus and Cure Depth in Microstereolithography

Yayue Pan, Yong Chen
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2015, 3(3): 031001.
Paper No: JMNM-14-1068
https://doi.org/10.1115/1.4030661
Published Online: September 1, 2015
View Article titled, Smooth Surface Fabrication Based on Controlled Meniscus and Cure Depth in Microstereolithography
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Topics: Approximation, Errors, Manufacturing, Modeling, Microscale devices, Computer-aided design, Shapes
Journal Articles

Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils With Silicon Punches

Sven Hildering, Ulf Engel, Marion Merklein
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2015, 3(2): 021001.
Paper No: JMNM-14-1052
https://doi.org/10.1115/1.4029629
Published Online: June 1, 2015
View Article titled, Influence of Process Errors on the Tool Load in Microblanking of Thin Metal Foils With Silicon Punches
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Topics: Copper foil, Cutting, Errors, Silicon, Stress, Blanking (Metalworking), Simulation, Tension
Journal Articles

Analysis of Micro/Mesoscale Sheet Forming Process by Strain Gradient Plasticity and Its Characterization of Tool Feature Size Effects

Linfa Peng, Peiyun Yi, Peng Hu, Xinmin Lai, Jun Ni
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2015, 3(1): 011006.
Paper No: JMNM-14-1027
https://doi.org/10.1115/1.4029262
Published Online: March 1, 2015
View Article titled, Analysis of Micro/Mesoscale Sheet Forming Process by Strain Gradient Plasticity and Its Characterization of Tool Feature Size Effects
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Topics: Dimensions, Plasticity, Strain gradient, Stress, Errors, Dislocations, Computer simulation
Journal Articles

Effects of Different Cavity Geometries on Machining Performance in Micro-Electrical Discharge Milling

Shrikant Vidya, Vijay, Swapan Barman, Aneissha Chebolu, Nagahanumaiah, Alok Kr. Das
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2015, 3(1): 011007.
Paper No: JMNM-14-1041
https://doi.org/10.1115/1.4029275
Published Online: March 1, 2015
View Article titled, Effects of Different Cavity Geometries on Machining Performance in Micro-Electrical Discharge Milling
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Topics: Cavities, Electrical discharge machining, Electrodes, Machining, Milling, Shapes, Errors, Rotation, Columns (Structural)
Journal Articles

Quantifying Dispersion of Nanoparticles in Polymer Nanocomposites Through Transmission Electron Microscopy Micrographs

Xiaodong Li, Hui Zhang, Jionghua Jin, Dawei Huang, Xiaoying Qi, Zhong Zhang, Dan Yu
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. June 2014, 2(2): 021008.
Paper No: JMNM-13-1068
https://doi.org/10.1115/1.4027339
Published Online: April 23, 2014
View Article titled, Quantifying Dispersion of Nanoparticles in Polymer Nanocomposites Through Transmission Electron Microscopy Micrographs
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Topics: Nanoparticles, Simulation, Errors
Journal Articles

Process Parameter Effects on Dimensional Accuracy of Micro-Injection Moulded Part

M. R. Mani, R. Surace, P. Ferreira, J. Segal, I. Fassi, S. Ratchev
Journal: Journal of Micro and Nano-Manufacturing
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. September 2013, 1(3): 031003.
Paper No: JMNM-12-1056
https://doi.org/10.1115/1.4025073
Published Online: August 12, 2013
View Article titled, Process Parameter Effects on Dimensional Accuracy of Micro-Injection Moulded Part
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Topics: Errors, Molding, Polymer melts, Polymers, Pressure, Temperature, Viscosity, Dimensions, Pins (Engineering), Flow (Dynamics)