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Journal Articles

Recent Advancements in Micro- and Nano-Manufacturing From WCMNM2023—Part I

Ramesh Singh, Pavel Penchev, Tohru Sasaki

Publisher: ASME

J. Micro Nano-Manuf. June 2023, 11(2): 020301.

Paper No: JMNM-24-1029

https://doi.org/10.1115/1.4065931

Published Online: July 30, 2024

View Article titled, Recent Advancements in Micro- and Nano-Manufacturing From WCMNM2023—Part I

Topics: Nanomanufacturing

Journal Articles

Recent Advancements in Micro- and Nano-Manufacturing From WCMNM2023—Part II

Ramesh Singh, Pavel Penchev, Tohru Sasaki

Publisher: ASME

J. Micro Nano-Manuf. September 2023, 11(3): 030301.

Paper No: JMNM-24-1030

https://doi.org/10.1115/1.4065932

Published Online: July 30, 2024

View Article titled, Recent Advancements in Micro- and Nano-Manufacturing From WCMNM2023—Part II

Topics: Nanomanufacturing

Journal Articles

Special Issue on Remote Micro- and Nano-Manufacturing Science, Engineering, and Education

Lawrence Kulinsky, Massimiliano Annoni, Irene Fassi

Publisher: ASME

J. Micro Nano-Manuf. September 2021, 9(3): 030301.

Paper No: JMNM-21-1013

https://doi.org/10.1115/1.4051319

Published Online: June 25, 2021

View Article titled, Special Issue on Remote Micro- and Nano-Manufacturing Science, Engineering, and Education

Topics: Education, Nanomanufacturing, Manufacturing

Journal Articles

Special Issue on Advances in Micro- and Nano-Manufacturing

Ping Guo

Publisher: ASME

J. Micro Nano-Manuf. December 2020, 8(4): 040301.

Paper No: JMNM-21-1012

https://doi.org/10.1115/1.4050263

Published Online: March 4, 2021

View Article titled, Special Issue on Advances in Micro- and Nano-Manufacturing

Topics: Nanomanufacturing

Journal Articles

Special Section on Recent Advancements in Micro- and Nano-Manufacturing From the WCMNM2019

Lawrence Kulinsky

Publisher: ASME

J. Micro Nano-Manuf. March 2020, 8(1): 010301.

Paper No: JMNM-20-1003

https://doi.org/10.1115/1.4046219

Published Online: February 19, 2020

View Article titled, Special Section on Recent Advancements in Micro- and Nano-Manufacturing From the WCMNM2019

Topics: Nanomanufacturing, Micromanufacturing

Journal Articles

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Irene Fassi, Lawrence Kulinsky, Martin Byung-Guk Jun

Publisher: ASME

J. Micro Nano-Manuf. March 2019, 7(1): 010301.

Paper No: JMNM-19-1015

https://doi.org/10.1115/1.4043692

Published Online: May 17, 2019

View Article titled, Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Topics: Micromanufacturing, Nanomanufacturing, Additive manufacturing, Lasers, Manufacturing, Micromilling, Vibration, Adhesion, Carbon, Cathode ray oscilloscopes

Journal Articles

Editorial

Nicholas Fang

Publisher: ASME

J. Micro Nano-Manuf. June 2018, 6(2): 020201.

Paper No: JMNM-18-1006

https://doi.org/10.1115/1.4039563

Published Online: April 12, 2018

View Article titled, Editorial

Topics: Nanomanufacturing, Manufacturing

Journal Articles

Tool Path Planning for Directional Freezing-Based Three-Dimensional Printing of Nanomaterials

Guanglei Zhao, Chi Zhou, Dong Lin

Publisher: ASME

J. Micro Nano-Manuf. March 2018, 6(1): 010905.

Paper No: JMNM-17-1027

https://doi.org/10.1115/1.4038452

Published Online: December 14, 2017

View Article titled, Tool Path Planning for Directional Freezing-Based Three-Dimensional Printing of Nanomaterials

Topics: Additive manufacturing, Freezing, Nanomaterials, Path planning, Printing, Temperature distribution, Geometry, Solidification, Nanomanufacturing, Temperature

Journal Articles

Special Section on Micro- and Nano-Additive Manufacturing—Part 1

Yayue Pan

Publisher: ASME

J. Micro Nano-Manuf. December 2017, 5(4): 040301.

Paper No: JMNM-17-1049

https://doi.org/10.1115/1.4037876

Published Online: September 27, 2017

View Article titled, Special Section on Micro- and Nano-Additive Manufacturing—Part 1

Topics: Manufacturing, Nanomanufacturing

Journal Articles

In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism

Tsung-Fu Yao, Andrew Duenner, Michael Cullinan

Publisher: ASME

J. Micro Nano-Manuf. March 2017, 5(1): 011001.

Paper No: JMNM-16-1036

https://doi.org/10.1115/1.4034634

Published Online: November 9, 2016

View Article titled, In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism

Topics: Atomic force microscopy, Bending (Stress), Design, Semiconductor wafers, Nanomanufacturing, Inspection, Kinematics

Journal Articles

Special Section: Scalable Nanomanufacturing

Rajiv Malhotra

Publisher: ASME

J. Micro Nano-Manuf. December 2016, 4(4): 040201.

Paper No: JMNM-16-1040

https://doi.org/10.1115/1.4034644

Published Online: October 10, 2016

View Article titled, Special Section: Scalable Nanomanufacturing

Topics: Nanomanufacturing

Journal Articles

A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications

Andrew Duenner, Tsung-Fu Yao, Bruno De Hoyos, Marianna Gonzales, Nathan Riojas, Michael Cullinan

Publisher: ASME

J. Micro Nano-Manuf. December 2016, 4(4): 041006.

Paper No: JMNM-16-1027

https://doi.org/10.1115/1.4034610

Published Online: October 10, 2016

View Article titled, A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications

Topics: Errors, Semiconductor wafers, Nanomanufacturing, Robots

Journal Articles

Tip-Based Nanomanufacturing of Nanofluidics Using Atomic Force Microscopy

Rapeepan Promyoo, Hazim El-Mounayri, Mangilal Agarwal, Varun Kumar Karingula, Kody Varahramyan

Publisher: ASME

J. Micro Nano-Manuf. December 2016, 4(4): 041003.

Paper No: JMNM-16-1024

https://doi.org/10.1115/1.4034608

Published Online: October 10, 2016

View Article titled, Tip-Based Nanomanufacturing of Nanofluidics Using Atomic Force Microscopy

Topics: Atomic force microscopy, Manufacturing, Microchannels, Nanofluidics, Nanomanufacturing, Lithography

Journal Articles

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Shrawan Singhal, Michelle A. Grigas, S. V. Sreenivasan

Publisher: ASME

J. Micro Nano-Manuf. September 2016, 4(3): 031004.

Paper No: JMNM-16-1008

https://doi.org/10.1115/1.4033742

Published Online: July 1, 2016

View Article titled, Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Topics: Particulate matter, Contamination, Nanofabrication, Film thickness, Deformation, Nanoscale phenomena, Nanomanufacturing

Journal Articles

Controlled Kinetic Monte Carlo Simulation for Computer-Aided Nanomanufacturing

Yan Wang

Publisher: ASME

J. Micro Nano-Manuf. March 2016, 4(1): 011001.

Paper No: JMNM-14-1017

https://doi.org/10.1115/1.4031461

Published Online: September 23, 2015

View Article titled, Controlled Kinetic Monte Carlo Simulation for Computer-Aided Nanomanufacturing

Topics: Simulation, Nanomanufacturing, Lithography, Self-assembly

Journal Articles

Laser-Energized Plasmonics for Nanopatterning Medical Devices

P. A. Molian

Publisher: ASME

J. Micro Nano-Manuf. September 2015, 3(3): 031003.

Paper No: JMNM-15-1004

https://doi.org/10.1115/1.4030680

Published Online: September 1, 2015

View Article titled, Laser-Energized Plasmonics for Nanopatterning Medical Devices

Topics: Laser ablation, Lasers, Medical devices, Nanomanufacturing, Stents, Nanoscale phenomena, Plasmons (Physics)

Journal Articles

Editorial

Publisher: ASME

J. Micro Nano-Manuf. March 2013, 1(1): 010201.

Paper No: JMNM-13-1014

https://doi.org/10.1115/1.4023753

Published Online: March 22, 2013

View Article titled, Editorial

Topics: Manufacturing, Nanomanufacturing, Sensors, Design, Metrology

Journal citation

NARROW

Recent Advancements in Micro- and Nano-Manufacturing From WCMNM2023—Part I

Recent Advancements in Micro- and Nano-Manufacturing From WCMNM2023—Part II

Special Issue on Remote Micro- and Nano-Manufacturing Science, Engineering, and Education

Special Issue on Advances in Micro- and Nano-Manufacturing

Special Section on Recent Advancements in Micro- and Nano-Manufacturing From the WCMNM2019

Special Section on Recent Advancements in Micro- and Nano‐manufacturing From the WCMNM2018—Part 1

Editorial

Tool Path Planning for Directional Freezing-Based Three-Dimensional Printing of Nanomaterials

Special Section on Micro- and Nano-Additive Manufacturing—Part 1

In-Line Dimensional Metrology in Nanomanufacturing Systems Enabled by a Passive Semiconductor Wafer Alignment Mechanism

Special Section: Scalable Nanomanufacturing

A Low-Cost, Automated Wafer Loading System With Submicron Alignment Accuracy for Nanomanufacturing and Nanometrology Applications

Tip-Based Nanomanufacturing of Nanofluidics Using Atomic Force Microscopy

Mechanics-Based Approach for Detection and Measurement of Particle Contamination in Proximity Nanofabrication Processes

Controlled Kinetic Monte Carlo Simulation for Computer-Aided Nanomanufacturing

Laser-Energized Plasmonics for Nanopatterning Medical Devices

Editorial

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