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Keywords: area-depth approximation model
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Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Micro Nano-Manuf. December 2019, 7(4): 044501.
Paper No: JMNM-19-1023
Published Online: November 14, 2019
.... A quantitative area-depth approximation model was formulated based on the gain factors. A comparison of the measured and the simulated results of microholes presented average 96.5% accuracy for the area and 85.7% for the depth. This research provided a simple but effective approach to predict dimensions...
