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Keywords: nanoparticle emissions
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Micro Nano-Manuf. March 2019, 7(1): 011001.
Paper No: JMNM-18-1032
Published Online: April 15, 2019
.... Nanoparticle emissions from the MACE process, however, are of grave concerns due to their hazardous effects on both occupational and public health. In this study, both airborne and aqueous nanoparticle emissions from the MACE process for SiNWs with three sizes of 90 nm, 120 nm, and 140 nm are experimentally...
