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Keywords: suction process
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Journal Articles
Publisher: ASME
Article Type: Research-Article
J. Sol. Energy Eng. June 2015, 137(3): 031010.
Paper No: SOL-14-1060
Published Online: June 1, 2015
... springs (with the stiffness of 28,800 kN/m) which are allowed to move along the z axis (normal to the wafer plane). In this study, suction process is investigated in two stages: touching the wafer (impact to the wafer for picking) and releasing wafer after transportation toward the right position...